Abstract: The effect of phase-shift error in phase shifting interferometry
is investigated. A new algorithm with two sets of 4 samples for
eliminating phase-shift error is presented. The computer
simulation and experiment result show that the phase-shift
offset should be π when the algorithm is used, and this
algorithm has gotten better result than the original 4-sample
algorithm.
Key words: Phase
shifting interferometry Error compensation Profile measurement
*
This project
is supported by Municipal Applied Basic Research Foundation of Chongqing.
Manuscript received on
December 25, 1997; revised manuscript September 15, 1998
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