Abstract: The physical datum method that uses the laser beam as the
physical datum is proposed. A high accuracy of the straight
movement on the line above 0.01μm/100 mm is archived through
applying the method of the closed-loop feedback control that
uses the laser beam as the datum. The measuring accuracy above
0.05 μm is obtained by applying the self-making electric eddy
displacement sensor to detect the geometric accuracy of the
optical flat. It proves that the laser beam datum method can
achieve the high accuracy of the straight movement and has the
huge advantage.
Key words: Laser
beam datum Optical flat Profile precision measurement
Manuscript received on
April 9, 1998; revised manuscript March 14, 1999
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