Abstract:
A scanning near-field
acoustic microscopy (SNAM) used in imaging the topography of
precise surfaces is presented. As a micro-force sensor, a
non-encapsulated 1 MHz quartz resonator is damped by
hydrodynamic forces when approaching an object. Thus the
oscillating characteristics of the leg of the quartz resonator
change. While measuring the decrease of the amplitude of
vibrating ,the shape of the object can be obtained. Based on the
analyses of the principle and key parameters of SNAM, a SNAM is
exploited. A lateral resolution of 0.5m and vertical resolution
of 2 nm has been achieved in the experiments.
Key words: Scanning near-field microscopy Quartz resonator Resolution
*
This project
is supported by Doctor Grant of National Education Ministry (No.97048707).
Manuscript received on June 16, 2000; revised manuscript April 12, 2001
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