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Du Liqun
Zhao Haibo
Key Laboratory for Precision and Non-traditional Machining
Technology
of Ministry of Education,
Dalian University of Technology,
Dalian 116024, China
Fukuda Toshio
Arai Fumihito
Department of Micro System Engineering,
Nagoya University,
Nagoya 464-0814, Japan
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MICRO TOUCH
SENSOR USING
PIEZOELECTRIC
THIN FILM FOR
MINIMAL ACCESS
SURGERY*
Abstract: The micro touch sensor which is designed to be used in the blood vessels is proposed. Using this touch sensor, the risk of injuring blood vessels can be reduced. A prototype of micro touch sensor using PZT (lead zirconate titanate) thin film synthesized by hydrothermal method is made. The basic properties of the micro touch sensor are studied. In order to analyses the properties of the micro touch sensor, a mathematical model is set up.
Key words:
Touch sensor PZT thin film Hydrothermal method Catheter |