|
Wang Yonghong
Yu Xiaofen
School of Instrumentation,
Hefei University of Technology,
Hefei 230009, China |
|
|
Error Analysis of 3D
Detecting
System Based on Whole-Field
Parallel Confocal microscope*
Abstract:
Compared with the traditional scanning confocal microscopy, the effect of various factors on characteristic in multi-beam parallel confocal system is discussed, the error factors in multi-beam parallel confocal system are analyzed. The factors influencing the characteristics of the multi-beam parallel confocal system are discussed. The construction and working principle of the non-scanning 3D detecting system is introduced, and some experiment results prove the effect of various factors on the detecting system.
Key words: 3D profile Parallel detecting Confocal Microlens array |