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LENG Changlin
ZHANG Guoxiong
ZHONG Ying
JIANG Chengzhi
State Key Laboratory of Precision
Measuring Technology and Instruments,
Tianjin University,
Tianjin 300072, China
YU Fusheng
Department of Mechatronics,
Shandong Institute of Architecture
and Engineering,
Jinan 250061, China |
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VIBRATION MEASUREMENT OF
DOUBLE-ENDED TUNING FORKS
RESONATOR*
Abstract:
To enhance the coherence and reliability of the double-ended tuning fork (DETF) resonator, a measurement system of resonator vibration is presented to check its dynamic characteristics. Laser Doppler techniques are utilized and the relation between DETF vibration velocity and output current of photodetector is obtained. Resonator vibration equation is also analyzed and its driving power only depends on the direct current bias voltage and the amplitude of alternative voltage. Furthermore, a special resonator driving control circuit based on measurement is designed. The amplitude and frequency of circuit is controlled by a computer so that highly stable and strong driving signal can be output. Experiments on driving and measuring double-ended tuning fork have been done. The frequency of driving signal is 8 kHz and the peak-to-peak value of driving voltage is 140 V. Experimental results indicate resonator can be drived stably by driving control circuit and dynamic characteristics of DETF may be measured in real time.
Key words:
Resonator Optical measurement Tuning fork MEMS Laser doppler |