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LIU Junshan
Wang Liding
Liu Chong
Luo Yi
Key Laboratory for Precision and Non-traditional Machining
Technology of Ministry of Education,
Dalian University of Technology,
Dalian 116023, China
Key Laboratory for Micro/Nano
Technology and System
of Liaoning Province,
Dalian University of Technology,
Dalian 116023, China |
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Hot Embossing Methods
for Plastic Microchannel
Fabrication*
Abstract:
Fabrication of microchannels on polymethylmethacrylate (PMMA) substrates using novel microfabrication methods is demonstrated. The image of microchannels is transferred from a silicon master possessing the inverse image of the microchannel to a PMMA plate by using hot embossing methods. The silicon master is electrostatically
bonded to a Pyrex 7740 glass wafer, which improves the device
yield from about 20 devices to hundreds of devices per master.
Effects of embossing temperature, pressure and time on the
accuracy of replication are systematically studied using the orthogonal factorial design. According to the suggested experimental model, the time for the whole embossing procedure is shorten from about 20 min to 6 min, and the accuracy of replication is 99.3%. The reproducibility of the hot embossing method is evaluated using 10 channels on different micro-fluidic devices, with variations of 1.4 % in depth and 1.8% in width.
Key words:
Microchannel Microfluidics Hot embossing Plastic Polymethylmethacrylate (PMMA)
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