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HAN Guangping
LIU Kai
School of Mechanical and Instrumental
Engineering,
Xi’ an University of Technology,
Xi’ an 710048, China
WANG Xiuhong
Department of Industry Engineering,
Zhengzhou Institute of Aeronautical
Industry Management,
Zhengzhou 450015, China |
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MECHANICAL PROPERTIES AND
SIZE EFFECTS OF SINGLE CRYSTAL
SILICON
Abstract:
Six kinds of micro bridge-beam specimens with different sizes are fabricated using photolithography technology for bending test. Beam specimens with trapezoidal section could be representatives of those with rectangle and square section, which are usually applied in MEMS. Nano
indentation method used in bending test can be applied to both
elastic and plastic materials. Also, some mechanical properties parameters such as the modulus of elasticity, hardness and the bending strength are obtained. The average modulus of elasticity of SCS is 170.295 0±2.485 0 GPa, showing no size effects, but the bending strength ranges from 3.24 GPa to 10.15 GPa, displaying strong size effects, and the average hardness is 9.496 7±1.753 3 GPa, in which no obvious size effects are observed.
Key words:
Mechanical properties Modulus of elasticity Size effect Nano indentation Bending test
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