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LIU Chong
LIAO Junfeng
Research Center for Micro
System Technology,
Dalian University of Technology,
Dalian 116024, China
WANG Xiaodong
WANG Liding
Key Laboratory for Precision and
Nontraditional Machining Technology
of Ministry of Education,
Dalian University of Technology,
Dalian 116024, China
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PRESSURE FORCE CONTROL
FOR FABRICATION OF PLASTIC MICROFLUIDIC CHIPS WITH HOT EMBOSSING
METHOD*
Abstract:
A pressure force control system for hot embossing of microfluidic chips is designed with a moment motor and a ball bearing lead screw. Based on the numeric PID technique, the algorithm of pulsant integral accelerated PID control is presented and the negative effects of nonlinearity from friction, clearance and saturation are eliminated. In order to improve the quick-response characteristic, independent thread technique is adopted. The method of pressure force control based on pulsant integral accelerated PID control and independent thread technique is applied with satisfactory control performance.
Key words:
Microfluidic chip Hot embossing Pressure force control Nonlinearity |