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HUA Shunming
CHENG Guangming
FAN Zunqiang
YANG Zhigang
College of Mechanical Science
and Engineering,
Jilin University,
Changchun 130025, China
SUZUKI Katsiyoshi
Faculty of Technology,
Yamagata University,
Yonezawa 992-0062, Japan
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TRAVELING MACHINE DRIVEN BY
PIEZOELECTRIC BIMORPH*
Abstract:
A rectangular bimorph will vibrate in bending mode under alternating current (AC) electric field. If two opposite tips along longitudinal direction are both clamped, the maximum magnitude of bending displacement occurs on the short center line. Using bimorph type vibrators forementioned
as actuators, an invention of simple traveling machine based on
stick-slip principle is presented. The machine can not only move
along both x and y direction within horizontal working plane,
further-more, excellent bearing ability and agile response as
well as stable step are also proved. In addition, the machine
can work on stepping mode and scanning mode at the same time,
hence the contradiction between long stroke and high precise
positioning is solved. Therefore, it meets the needs of micro/nanometer precise positioning under long stroke and is desired to be used as carrying stage for micro-assembling system and locomotive mechanism for miniature robot system.
Key words:
Traveling machine Piezoelectric bimorph Stick-slip principle |