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GAO Rong
WANG Xiaojing
School of Mechanical Electronic
Engineering and Automation,
Shanghai University,
Shanghai 200072, China
WANG Min
No. 802 Institute,
Shanghai Academy of Spaceflight
Technology,
Shanghai 200090, China
YU Maohua
XIE Mingchun
School of Mechanical Electronic
Engineering and Automation,
Shanghai University,
Shanghai 200072, China
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NONLINEAR DYNAMICS OF LATERAL
MICRO-RESONATOR INCLUDING VISCOUS AIR DAMPING*
Abstract: The nonlinear dynamics of
the lateral micro-resonator including the air damping effect is
researched. The air damping force is varied periodically during
the resonator oscillating, and the air damp coefficient can not
be fixed as a constant. Therefore the linear dynamic analysis
which used the constant air damping coefficient can not describe
the actual dynamic characteristics of the micro-resonator. The
nonlinear dynamic model including the air damping force is
established. On the base of Navier-Stokes equation and nonlinear
dynamical equation, a coupled fluid-solid numerical simulation
method is developed and demonstrates that damping force is a
vital factor in micro-comb structures. Compared with existing
experimental result, the nonlinear numerical value has quite
good agreement with it. The differences of the amplitudes (peak)
between the experimental data and the results by the linear
model and the nonlinear model are 74.5% and 6% respectively.
Nonlinear numerical value is more exact than linear value and
the method can be applied in other micro-electro-mechanical
systems (MEMS) structures to simulate the dynamic performance.
Key words:
Air damping Nonlinear dynamics
Micro-resonator
Micro-electro-mechanical systems (MEMS) |