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CHEN Ming
MA Yuping
XIANG Daohui
SUN Fanghong
School of
Mechanical Engineering,
Shanghai Jiaotong University,
Shanghai 200240, China |
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FABRICATION OF DIAMOND TUBES
IN BIAS-ENHANCED HOT-FILAMENT
CHEMICAL VAPOR DEPOSITION
SYSTEM*
Abstract:
Deposition of diamond thin films on tungsten wire substrate with the gas mixture of acetone and hydrogen by using bias-enhanced hot filament chemical vapor deposition (CVD) with the tantalum wires being optimized arranged is investigated. The self-supported diamond tubes are obtained by etching away the tungsten substrates. The quality of the diamond film before and after the removal of substrates is observed by scanning electron microscope (SEM) and Raman spectrum. The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD. The compressive stress in diamond film formed during the deposition is released after the substrate etches away by mixture of H2O2
and NH4OH. There is no residual stress in diamond tube after
substrate removal.
Key words:
Diamond tube Hot-filament chemical vapor deposition Fabrication High quality |